Compact storage rings Siberia-AS and Siberia-SM synchrotron...

Review of Scientific Instruments 1989 Vol. 60; Iss. 7

Compact storage rings Siberia-AS and Siberia-SM synchrotron radiation sources for lithography

Anashin, V. V., Arbuzov, V. S., Blinov, G. A., Veshcherevich, V. G., Vobly, P. D., Gorniker, E. I., Zinevich, N. I., Zinin, E. I., Zubkov, N. I., Kiselev, V. A., Kollerov, E. P., Kulipanov, G. N., Mat
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Volume:
60
Year:
1989
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1140949
File:
PDF, 672 KB
english, 1989
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