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[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Boron pile-up phenomena during ultra shallow junction formation
Ferri, M., Solmi, S., Giubertoni, D., Bersani, M., Hamilton, J. J., Kah, M., Cowern, N.E.B., Kirkby, K., Collart, E.J.H.Year:
2007
Language:
english
DOI:
10.1109/rtp.2007.4383824
File:
PDF, 3.27 MB
english, 2007