Small-signal deep level transient spectroscopy on hydrogenated amorphous silicon based metal/insulator/semiconductor structures
Thurzo, Ilja, Nádaždy, Vojtech, Teramura, Satoshi, Durný, Rudolf, Kumeda, Minoru, Shimizu, TatsuoVolume:
84
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.368978
File:
PDF, 385 KB
english, 1998