Anisotropically etched deep gratings for InP/InGaAsP...

Journal of Applied Physics 1987 Vol. 62; Iss. 8

Anisotropically etched deep gratings for InP/InGaAsP optical devices

Koch, T. L., Corvini, P. J., Tsang, W. T.
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Volume:
62
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.339319
File:
PDF, 548 KB
english, 1987
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