Lattice strain induced by boron clusters in crystalline silicon
Bisognin, G, Salvador, D De, Napolitani, E, Carnera, A, Bruno, E, Mirabella, S, Priolo, F, Mattoni, AVolume:
21
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/21/6/L01
Date:
June, 2006
File:
PDF, 210 KB
english, 2006