![](/img/cover-not-exists.png)
Real-time monitoring of the Si carbonization process by a combined method of reflection high-energy electron diffraction and Auger electron spectroscopy
Kosugi, Ryoji, Takakuwa, Yuji, Kim, Ki-Seon, Abukawa, Tadashi, Kono, ShozoVolume:
74
Year:
1999
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.124230
File:
PDF, 252 KB
english, 1999