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Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas
Edamura, Manabu, Benck, Eric C.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1641052
File:
PDF, 870 KB
english, 2004