HfO[sub 2]-based insulating stacks on 4H–SiC(0001)
Afanas’ev, V. V., Stesmans, A., Chen, F., Campbell, S. A., Smith, R.Volume:
82
Year:
2003
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1538310
File:
PDF, 294 KB
english, 2003