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Control of the radio-frequency wave form at the chuck of an industrial oxide-etch reactor
Berry, Lee, Maynard, Helen, Miller, Paul, Moore, Tony, Pendley, Michael, Resta, Victoria, Sparks, Dennis, Yang, QingyunVolume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1319819
File:
PDF, 598 KB
english, 2000