![](/img/cover-not-exists.png)
Reliability of a popular simulation code for predicting sputtering yields of solids and ranges of low-energy ions
Wittmaack, KlausVolume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1776318
File:
PDF, 385 KB
english, 2004