Reliability of a popular simulation code for predicting...

Reliability of a popular simulation code for predicting sputtering yields of solids and ranges of low-energy ions

Wittmaack, Klaus
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Volume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1776318
File:
PDF, 385 KB
english, 2004
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