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Damage and recovery in boron doped silicon on insulator layers after high energy Si[sup +] implantation
Ferri, M., Solmi, S., Nobili, D., Armigliato, A.Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2220719
File:
PDF, 413 KB
english, 2006