Damage and recovery in boron doped silicon on insulator...

Damage and recovery in boron doped silicon on insulator layers after high energy Si[sup +] implantation

Ferri, M., Solmi, S., Nobili, D., Armigliato, A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2220719
File:
PDF, 413 KB
english, 2006
Conversion to is in progress
Conversion to is failed