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High-throughput resistivity apparatus for thin-film combinatorial libraries
Hewitt, K. C., Casey, P. A., Sanderson, R. J., White, M. A., Sun, R.Volume:
76
Year:
2005
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2037947
File:
PDF, 1.16 MB
english, 2005