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Chemical sensing using nonoptical microelectromechanical systems
Freidhoff, C. B., Young, R. M., Sriram, S., Braggins, T. T., O'Keefe, T. W., Adam, J. D., Nathanson, H. C., Syms, R. R. A., Tate, T. J., Ahmad, M. M., Taylor, S., Tunstall, J.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581764
File:
PDF, 939 KB
english, 1999