The impact of the density and type of reactive sites on the...

Journal of Applied Physics 2006 Vol. 99; Iss. 6

The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited WN[sub x]C[sub y] films

Martin Hoyas, A., Travaly, Y., Schuhmacher, J., Sajavaara, T., Whelan, C. M., Eyckens, B., Richard, O., Giangrandi, S., Brijs, B., Vandervorst, W., Maex, K., Celis, J. P., Jonas, A. M., Vantomme, A.
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Volume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2182074
File:
PDF, 506 KB
english, 2006
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