![](/img/cover-not-exists.png)
[ACS Symposium Series] Polymeric Materials for Microelectronic Applications Volume 579 (Science and Technology) || Surface Imaging for Applications to Sub-0.35-μm Lithography
Ito, Hiroshi, Tagawa, Seiichi, Horie, KazuyukiVolume:
10.1021/bk
Year:
1995
Language:
english
DOI:
10.1021/bk-1994-0579.ch016
File:
PDF, 2.69 MB
english, 1995