Ion bombardment as the initial stage of diamond film growth

Journal of Applied Physics 2001 Vol. 89; Iss. 3

Ion bombardment as the initial stage of diamond film growth

Liao, Meiyong, Qin, Fuguang, Zhang, Jianhui, Liu, Zhikai, Yang, Shaoyan, Wang, Zhanguo, Lee, Shuit-Tong
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Volume:
89
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1338997
File:
PDF, 417 KB
english, 2001
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