Fabrication of 1.4-kV mesa-type p[sup +]–n diodes with...

Fabrication of 1.4-kV mesa-type p[sup +]–n diodes with avalanche breakdown and without forward degradation on high-quality 6H-SiC substrate

Tanaka, Yasunori, Nishizawa, Shin-ichi, Fukuda, Kenji, Arai, Kazuo, Ohno, Toshiyuki, Oyanagi, Naoki, Suzuki, Takaya, Yatsuo, Tsutomu
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Volume:
83
Year:
2003
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1591062
File:
PDF, 318 KB
english, 2003
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