A compact three-axis cryogenic ultrahigh vacuum manipulator

A compact three-axis cryogenic ultrahigh vacuum manipulator

Dürr, H.
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Volume:
8
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.577048
Date:
January, 1990
File:
PDF, 1.25 MB
english, 1990
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