In situ evolution of stress gradients in Cu films induced by capping layers
Murray, Conal E., Besser, Paul R., Witt, Christian, Toney, MichaelVolume:
96
Year:
2010
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3458864
File:
PDF, 501 KB
english, 2010