Mass spectrometric determination of trace oxygen

Mass spectrometric determination of trace oxygen

Lieszkovszky, L.
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Volume:
5
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.574314
Date:
September, 1987
File:
PDF, 623 KB
english, 1987
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