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Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO[sub 3] thin films
Gao, Y., Perkins, C. L., He, S., Alluri, P., Tran, T., Thevuthasan, S., Henderson, M. A.Volume:
87
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.373005
File:
PDF, 454 KB
english, 2000