Compositionally gradient (Ti1−xAlx)N coatings made by...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1995 / 7 Vol. 13; Iss. 4

Compositionally gradient (Ti1−xAlx)N coatings made by plasma enhanced chemical vapor deposition

Lee, Sang-Hyeob
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Volume:
13
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.579648
Date:
July, 1995
File:
PDF, 526 KB
english, 1995
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