Magnetic field effects on secondary electron emission...

Journal of Applied Physics 2006 Vol. 100; Iss. 3

Magnetic field effects on secondary electron emission during ion implantation in a nitrogen plasma

Tan, Ing Hwie, Ueda, Mario, Dallaqua, Renato S., de Moraes Oliveira, Rogerio, Rossi, José O.
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Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2201695
File:
PDF, 356 KB
english, 2006
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