Thermal and sputtered aluminum oxide coatings for high...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1985 / 11 Vol. 3; Iss. 6

Thermal and sputtered aluminum oxide coatings for high temperature electrical insulation

Kreider, Kenneth G.
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Volume:
3
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.572838
Date:
November, 1985
File:
PDF, 909 KB
english, 1985
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