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Profiling and modeling of dc nitrogen microplasmas
Wilson, Chester G., Gianchandani, Yogesh B., Arslanbekov, Robert R., Kolobov, Vladimir, Wendt, Amy E.Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1595143
File:
PDF, 994 KB
english, 2003