Performance of a Compliant Structure for a Thermal Resonant...

Performance of a Compliant Structure for a Thermal Resonant Microgyroscope

Shakoor, Rana I., Srinivasan, Prasanna, Bazaz, S. A.
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Volume:
11
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2010.2094185
Date:
June, 2011
File:
PDF, 2.17 MB
english, 2011
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