Dimensional limitations of silicon nanolines resulting from...

Applied Physics Letters 1995 Vol. 66; Iss. 20

Dimensional limitations of silicon nanolines resulting from pattern distortion due to surface tension of rinse water

Namatsu, Hideo, Kurihara, Kenji, Nagase, Masao, Iwadate, Kazumi, Murase, Katsumi
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Volume:
66
Year:
1995
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.113115
File:
PDF, 370 KB
english, 1995
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