![](/img/cover-not-exists.png)
Effects of B18Hx+ and B18Hx dimer ion implantations on crystallinity and retained B dose in silicon
Kawasaki, Yoji, Shibahara, KentaroVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3655892
File:
PDF, 2.25 MB
english, 2012