Effects of B18Hx+ and B18Hx dimer ion implantations on...

Effects of B18Hx+ and B18Hx dimer ion implantations on crystallinity and retained B dose in silicon

Kawasaki, Yoji, Shibahara, Kentaro
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3655892
File:
PDF, 2.25 MB
english, 2012
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