Evidence for the precursors of nitrided silicon in the early stages of silicon oxynitridation in N[sub 2]:N[sub 2]O atmosphere
Cerofolini, G. F., Camalleri, M., Galati, C., Lorenti, S., Renna, L., Viscuso, O., Condorelli, G. G., Fragalà, I. L.Volume:
79
Year:
2001
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1404133
File:
PDF, 237 KB
english, 2001