Fabrication of superconducting tantalum nitride thin films using infrared pulsed laser deposition
Chaudhuri, Saumyadip, Maasilta, Ilari J., Chandernagor, Lucie, Ging, Marion, Lahtinen, ManuVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4812698
File:
PDF, 1.33 MB
english, 2013