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Process monitoring of hemispherical-grained silicon thin films for dynamic random access memory applications
Hayzelden, Clive, Bivas, Albert, Ygartua, Carlos L., Chan, Kin-ChungVolume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581905
File:
PDF, 375 KB
english, 1999