Role of Al2O3 intermediate layer for improving the quality...

Applied Surface Science 2015 / 02 Vol. 327

Role of Al2O3 intermediate layer for improving the quality of polycrystalline-silicon film in inverted aluminum-induced layer exchange

Duan, Weiyuan, Meng, Fanying, Bian, Jiantao, Yu, Jian, Zhang, Liping, Liu, Zhengxin
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Volume:
327
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.11.098
Date:
February, 2015
File:
PDF, 3.08 MB
english, 2015
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