Etching characteristics of LaNiO[sub 3] thin films in BCl[sub 3]∕Ar gas chemistry
Kim, Gwan-Ha, Kim, Chang-IlVolume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2201543
File:
PDF, 389 KB
english, 2006