Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2009 Vol. 27; Iss. 6
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Alternative developer solutions for extreme ultraviolet resist
Itani, Toshiro, Santillan, Julius JosephVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3258151
File:
PDF, 901 KB
english, 2009