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Design and fabrication of MEMS-controlled probes for studying the nano-interface under in situ TEM observation
Ishida, T, Nakajima, Y, Kakushima, K, Mita, M, Toshiyoshi, H, Fujita, HVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/7/075011
Date:
July, 2010
File:
PDF, 1.38 MB
english, 2010