![](/img/cover-not-exists.png)
Improvement of morphological stability of Ag thin film on a TiN layer with a thin interposing metal layer
Hong, C. Y., Peng, Y. C., Chen, L. J., Hsieh, W. Y., Hsieh, Y. F.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581703
File:
PDF, 719 KB
english, 1999