![](/img/cover-not-exists.png)
Polymerized C-Si films on metal substrates: Cu adhesion/diffusion barriers for ultralarge scale integration?
Chen, Li, Kelber, Jeffry A.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581712
File:
PDF, 388 KB
english, 1999