A vertical submicron polysilicon thin-film transistor using...

IEEE Electron Device Letters 1994 / 10 Vol. 15; Iss. 10

A vertical submicron polysilicon thin-film transistor using a low temperature process

Tiemin Zhao,, Min Cao,, Saraswat, K.C., Plummer, J.D.
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Volume:
15
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.320986
Date:
October, 1994
File:
PDF, 282 KB
english, 1994
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