Investigation of plasma immersion ion implantation of...

Journal of Applied Physics 2008 Vol. 103; Iss. 5

Investigation of plasma immersion ion implantation of nickel-titanium rod by multiple-grid particle-in-cell simulation

Kwok, Dixon T. K., Wu, Shuilin, Liu, Xiangmei, Fu, Ricky K. Y., Chu, Paul K.
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Volume:
103
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2890157
File:
PDF, 671 KB
english, 2008
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