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Microfabricated sequential-leaf time-delay mechanisms
Jing Liu,, Fan, L., DeVoe, D.L.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.851868
Date:
October, 2005
File:
PDF, 1.93 MB
english, 2005