Off-line efficiency measurements of the microwave discharge...

Off-line efficiency measurements of the microwave discharge source (MIDAS) at the Laboratorio Nazionale del Sud

Gammino, S., Ciavola, G., Celona, L., Torrisi, L., Castro, M., Chines, F., Marletta, S., Messina, E., Qin, J., Wang, Z.
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Volume:
69
Year:
1998
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1148564
File:
PDF, 361 KB
english, 1998
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