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Modeling of magnetically enhanced capacitively coupled plasma sources: Ar/C[sub 4]F[sub 8]/O[sub 2] discharges
Vasenkov, Alex V.Volume:
95
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1633661
File:
PDF, 791 KB
english, 2004