Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 6
Simultaneous observation of surface topography and elasticity at atomic scale by multifrequency frequency modulation atomic force microscopy
Naitoh, Yoshitaka, Ma, Zongmin, Li, Yan Jun, Kageshima, Masami, Sugawara, YasuhiroVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3503611
File:
PDF, 725 KB
english, 2010