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Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage
Hsieh, Tung Hsien, Jywe, Wen Yuh, Chen, Shang Liang, Liu, Chien Hung, Huang, Hsueh LiangVolume:
82
Year:
2011
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3585021
File:
PDF, 664 KB
english, 2011