[IEEE 2010 IEEE International Reliability Physics Symposium - Garden Grove (Anaheim), CA, USA (2010.05.2-2010.05.6)] 2010 IEEE International Reliability Physics Symposium - A multi-probe correlated bulk defect characterization scheme for ultra-thin high-к dielectric
Masuduzzaman, M., Islam, A.E., Alam, M.A.Year:
2010
Language:
english
DOI:
10.1109/irps.2010.5488673
File:
PDF, 690 KB
english, 2010