2∕3 in. ultrahigh-sensitivity image sensor with...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2010 Vol. 28; Iss. 2

2∕3 in. ultrahigh-sensitivity image sensor with active-matrix high-efficiency electron emission device

Nakada, Tomonari, Sato, Takanobu, Matsuba, Yohei, Sakemura, Kazuto, Okuda, Yoshiyuki, Negishi, Nobuyasu, Watanabe, Atsushi, Yoshikawa, Takamasa, Ogasawara, Kiyohide, Nanba, Masakazu, Tanioka, Kenkichi
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3271163
File:
PDF, 682 KB
english, 2010
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