The deposition and study of hard carbon films

Journal of Applied Physics 1989 Vol. 65; Iss. 10

The deposition and study of hard carbon films

Zou, J. W., Reichelt, K., Schmidt, K., Dischler, B.
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Volume:
65
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.343355
File:
PDF, 542 KB
english, 1989
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