High-performance metal-insulator-metal capacitor with Ge-stabilized tetragonal ZrO[sub 2]/amorphous La-doped ZrO[sub 2] dielectric
Wu, Yung-Hsien, Lin, Chia-Chun, Chen, Lun-Lun, Hu, Yao-Chung, Wu, Jia-Rong, Wu, Min-LinVolume:
98
Year:
2011
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3535605
File:
PDF, 832 KB
english, 2011