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Low-temperature synthesis of gallium nitride thin films using electron cyclotron resonance plasma assisted pulsed laser deposition from a GaAs target
Sun, J., Wu, A. M., Xu, N., Ying, Z. F., Shen, X. K., Dong, Z. B., Wu, J. D., Shi, L. Q.Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2091093
File:
PDF, 376 KB
english, 2005