Nanoscale probing of dielectric breakdown at SiO[sub...

Journal of Applied Physics 2011 Vol. 109; Iss. 1

Nanoscale probing of dielectric breakdown at SiO[sub 2]/3C-SiC interfaces

Eriksson, Jens, Roccaforte, Fabrizio, Fiorenza, Patrick, Weng, Ming-Hung, Giannazzo, Filippo, Lorenzzi, Jean, Jegenyes, Nikoletta, Ferro, Gabriel, Raineri, Vito
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Volume:
109
Year:
2011
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3525806
File:
PDF, 1.69 MB
english, 2011
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